Actuators need no guidance
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
May 15, 2006
Lever amplified piezo actuators provide significantly longer travel ranges than standard, direct drive actuators.
PI (Physik Instrumente), a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, semiconductor and life science applications, offers the new compact PiezoMove lever amplified z-actuators.
Lever amplified piezo actuators provide significantly longer travel ranges than standard, direct drive actuators.
What sets PiezoMove actuators apart are the internal frictionless flexure-guides, making additional bearings or guiding mechanisms obsolete when integrating the actuators into a positioning system.
Three versions providing up to 480um travel are available.
Piezo actuators can basically move in subnanometre increments.
However, open-loop actuators do not provide high linearity/repeatability.
PiezoMove actuators are available with integrated, absolute-measuring position sensors for closed-loop operation with high linearity (99.8%) and nanometre range repeatability.
The stiff design with high resonant frequencies to 750Hz allows settling times of only a few milliseconds, ideal for highly dynamic applications.
Reliability is assured by the use of award-winning PICMA multilayer actuators, which are integrated into a sophisticated, single-module, flexure guiding system.
The PICMA actuators feature cofired ceramic encapsulation and thus offer better performance and reliability than conventional piezo actuators.
The wire-EDM-cut flexures are FEA modelled to make them extremely precise.
In addition they are maintenance-free and not subject to wear.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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