Piezoelectric stages boast bigger travel
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Jun 8, 2006
New x-y piezoelectric stages provide a record travel range of 1000um and allow nanometrology/precision microscopy instrument designers to probe much larger areas than before.
PI (Physik Instrumente) offers the new closed-loop P-628.2CD x-y piezoelectric stages.
These precision flexure-guided scanning stages provide a record travel range of 1000um and allow nanometrology/precision microscopy instrument designers to probe much larger areas than before.
A lower cost, single axis version is also offered.
Typical applications include scanning probe microscopy, nanometrology, biotechnology, interferometry, nanopositioning, quality assurance and semiconductor technology The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy with trajectory precision in the low-nanometre range.
High acceleration forces are provided by multiple, newly-developed high-force multilayer piezo-stack actuators.
A variety of ultra-low-noise 32bit digital controllers provide fast communications and come with a wide selection of software tools.
Because flexure guides, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
The integrated multilayer piezo drives are protected against humidity by a patented ceramic encapsulation.
The stages are equipped with noncontact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the subnanometre range.
PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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