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Piezo actuators have unlimited resolution

A PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team Jun 20, 2006

PI (Physik Instrumente) has released the world's first fully integrated hybrid z-nanopositioning system employing piezoelectric and DC motor drives.

PI (Physik Instrumente) has released the world's first fully integrated hybrid z-nanopositioning system employing piezoelectric and DC motor drives.

The M-714 precision z-stage and C-702 hybrid controller combine the well-known piezo drive advantages of unlimited resolution and very fast response with the long travel ranges and high holding forces of a servomotor/ballscrew arrangement.

The highly specialised C-702 hybrid controller reads the stage position from an integrated, 2nm precison linear encoder and continuously actuates both the piezoelectric and servomotor drives in a way to provide the best possible overall performance.

Due to their instantaneous, submillisecond response, the integrated piezo actuators provide active stick/slip compensation during startup and settling.

They also improve velocity control and positioning performance when nanometre level steps need to be executed.

The C-702 hybrid controller is equipped with a novel high-speed encoder interface and can handle encoder count rates of 100 million pulses per second.

Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user.

Interface to the host computer is via TCP/IP or RS232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/Internet).

A 100mm hybrid translation stage is also available.

Find out more about this article. Request a brochure, download technical specifications and request samples here.

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