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Hybrid nanopositioning stage overcomes limits

A PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team Feb 12, 2007

Due to its high stiffness and instantaneous, sub-millisecond response, the the M-511.HD hybrid nanopositioning translation stage provides active stick/slip compensation during startup and settling.

PI (Physik Instrumente), a manufacturer of nanopositioning and precision motion control equipment for nanotechnology, photonics, semiconductor and life science applications, has released the M-511.HD hybrid nanopositioning translation stage.

The new hybrid system overcomes the limitations of conventional precision positioning systems by combing the well-known piezo-flexure-drive advantages of unlimited resolution and rapid response with the long travel ranges and high holding forces of a servo-motor/ballscrew arrangement.

The highly specialised C-702 hybrid nanopositioning controller reads the stage position from an integrated, 4nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives to provide the best possible overall performance.

Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling.

It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.

The C-702 hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count.

Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user.

Interface to the host computer is via TCP/IP or RS-232.

This interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).

Find out more about this article. Request a brochure, download technical specifications and request samples here.

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