Positioning system provides picometre resolution
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Apr 3, 2007
The minute P-363 PicoCube, together with its low noise E-536 driver/controller, provide significantly higher resolution and positional stability than previous multi-axis scanning stages.
A new high-resolution positioning and scanning system providing 25pm resolution is available now from PI.
The minute P-363 PicoCube, together with its low noise E-536 driver/controller, provide significantly higher resolution and positional stability than previous multi-axis scanning stages.
PicoCube systems were designed to overcome the limitations of open-loop piezo-tube based scanners which provide high resolution motion but poor linearity and trajectory guidance.
The compact PicoCube is based on exceptionally robust, high-stiffness piezo drives rather than tubes and employs noncontact, direct-measuring, parallel-metrology capacitive sensors for position feedback.
The low-inertia drives allow for a resonant frequency of 10kHz, important for high speed scanning applications.
Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for off-axis motion in real time.
The benefits are a reduction of runout and off-axis errors, straighter multi-axis motion and improved repeatability.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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