Displacement sensor brochure released
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Jul 27, 2007
PI (Physik Instrumente)'s brochure features a tutorial on single-plate and dual-plate capacitive sensors and an applications overview
PI (Physik Instrumente) has released a new brochure on capacitive nanometrology displacement sensors and electronics.
The brochure presents PI's state of the art sensor systems and also features a tutorial on single plate and dual plate capacitive sensors and an applications overview.
This covers measuring displacement with nanometer precision; nanopositioning / closed-loop systems; parallel metrology / high-precision multi-axis measurements; measuring straightness and flatness / active cross-talk compensation; out-of-plane measurement / constant-height scans / out-of-round measurement; tip / tilt measurement and compensation; measuring vibration, flatness, thickness; force sensors with micronewton sensitivity; and layer thickness measurement with sub-micron accuracy.
Capacitive sensors perform high-precision, noncontact measurements of geometric quantities representing displacement, separation, position, length or other linear dimensions against any kind of electrically conductive target.
These nanometrology sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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