Actuators provide piezo-class resolution
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Sep 21, 2007
Miniature ceramic linear motor actuator bridges the gap between micro- and nanopositioning devices.
New from PI (Physik Instrumente), the N-310 Nexact miniature ceramic linear motor actuator is designed to bridge the gap between micro- and nanopositioning devices.
At 0.5in3 volume and 50g mass, the new Nexact actuator is significantly smaller and more cost effective than its big "brother".
This high-force ceramic motor, dubbed Nexline has already won a technology award from the semiconductor community.
Nexact actuators provide piezo-class resolution (far below 1nm) and millisecond responsiveness.
The new technology combines virtually unlimited travel ranges with high stiffness in a very small package.
In operation, piezoceramic bending elements act on the ceramic runner, connected to the moving part of the application.
The length of the runner can be chosen as required, force capacity, resolution and velocity depend on the piezo geometry and are also scalable.
To move the runner over longer distances the stepping mode is used, whereas for distances smaller than 7um, the linear (sweep) mode enables high-dynamics positioning with resolutions far below 1nm.
The special drive design reduces the operating voltage to 40V and below.
In contrast to servo or stepper motor actuators, the piezo stepping elements effect linear motion directly, without the need to transform rotation with gears and leadscrews.
Backlash and wear are eliminated and the drive is maintenance-free.
Nexact actuators exhibit high stiffness and are self-locking when powered down with nanometre position stability, and zero dissipation or servo-dither at rest.
Typical applications include: laser tuning, nanotechnology, nano-imprint, semiconductor and data-storage test and production equipment, nanomanipulation and biotechnology.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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