Stages promise subnanometre resolution
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Feb 29, 2008
The ability to control motion with millisecond responsiveness and nanometre precision over long travel ranges makes PIHera stages ideal for measuring and QA applications.
PI (Physik Instrumente) has extended its PIHera family of compact x, x-y and z flexure-guided piezo nanopositioning tables, now offering record travel ranges to 1.8mm.
These precision closed-loop flexure-guided stages can be used for scanning probe applications (surface metrology) and static positioning.
Most PIHera stages provide subnanometre resolution, and even the 1.8mm versions achieve 3nm resolution in closed-loop operation.
The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy.
Trajectory precision is in the low-nanometre range.
High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators.
The ability to control motion with millisecond responsiveness and nanometre precision over long travel ranges makes PIHera stages ideal for measuring and QA applications.
The stages are equipped with noncontact capacitive-sensors and reduce motion linearity errors to 0.02% with effective resolution in the subnanometre range.
PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
Typical applications include: scanning probe microscopy, biotechnology, surface metrology, quality assurance, nanometrology, interferometry, nanopositioning and semiconductor technology.
A variety of ultra-low-noise controllers with both digital and analogue input provide fast communications and come with a wide selection of software tools.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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