PI brochure presents piezo flexure actuators

Physik Instrumente (PI), a manufacturer of equipment for semiconductor, biomedical and nanotechnology applications, has released a brochure on lever-amplified piezo flexure actuators.

The brochure presents a number of new applications along with a variety of low-cost flexure actuators for original equipment manufacturers (OEMs).

Piezo actuators and positioning systems provide high precision in the sub-nanometre region, such as that required in atomic force microscopy, nanotechnology and semiconductor applications.

Piezo actuators provide excellent dynamics and high force, which play a crucial role in many areas where the nanometre precision is of lesser importance, such as for fast switching, vibration cancellation or to adjust tools in machines.

The new Piezomove actuators combine flexure-guided motion with long travel ranges of up to 1mm.

They are compact, simple to integrate, require no maintenance and provide service lives of billions of cycles.

If nanometre precision is required, closed-loop versions are also available.

Application fields include: microfluidics (valves, pumps, microlitre and nanolitre dosing); biotechnology (cell manipulation, patch-clamp, microarrays, nanolitre dosing, dispensers and microstructuring with imprint processes); medical engineering (diaphragm pumps, valves, dosing, injection and sample handling); mechatronics, machining and adaptronics (active structures, vibration isolation, active tools and structure deformation); and laser technology and metrology (cavity tuning, beam control, the control of optics or slit widths and sample positioning).

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