Encoders feature at semiconductor equipment show

Renishaw is highlighting its new range of encoder solutions at the Semicon Japan exhibition and conference, being held at the Makuhari Messe, Chiba, from 7th to 9th December 2005.

Renishaw is highlighting its new range of encoder solutions at the Semicon Japan exhibition and conference, being held at the Makuhari Messe, Chiba, from 7th to 9th December 2005.

Described by organiser Semi as the biggest international exhibition of semiconductor equipment and materials on earth, Semicon Japan will highlight the latest technologies, materials and services for semiconductor wafer processing, testing and assembly.

Renishaw will be located in Hall 9, Stand 9A-212.

Other products of interest to Semicon Japan visitors will include Renishaw's new QuickView motion analysis software demonstrated in conjunction with the ML10 laser interferometer measurement system for machine calibration.

The focus for position feedback systems will be a new robust high accuracy linear encoder, a range of high-performance ultra-high-vacuum (UHV) encoders, high resolution laser interferometer encoders, plus demonstrations of improvements in speed, resolution and reliability to Renishaw's standard optical encoder lines of industrialised RG2 and RG4 linear encoders.

The technology extensions further consolidate Renishaw's position as a global leader in micron, nanometre and picometre position feedback systems for many applications from lab and medical instruments, and Semiconductor manufacturing equipment, to machine tools, metrology systems, and massive aerospace assembly machines.

At Semicon Japan, Renishaw will exhibit three different advanced technologies for precision positioning - optical, magnetic and laser interferometer - each providing special solutions to difficult applications.

All feature exceptional compactness and installation ease, providing tremendous design flexibility and application range.

Proven in thousands of installations across the spectrum of precision machines and instruments, Renishaw's optical encoders were created to bring high precision, speed and reliability to demanding environments and tough industrial applications.

Innovative metal scales avoid the fragility of glass encoders, while unique noncontact readheads and filtering optics avoid the bulkiness, hysteresis and wear of traditional industrial encoders.

A new Signum family of rotary and linear encoders applies that same formula of ruggedness and precision to deliver levels of performance previously possible only from fine-pitch systems too delicate for many industrial roles.

The new Signum encoder range offers high accuracy, resolution and repeatability with high speed, high operating temperatures, ultra-low cyclic error and innovative In-Trac optical reference mark, which remains phased over the entire speed and temperature specification.

The system offers intelligent signal processing, ensuring excellent reliability and ultralow cyclic error (typically less than +/-40nm), and comprehensive Signum software enables optimum set-up and real-time system diagnostics via a PC's USB port.

The Signum RESM annular encoder is a one-piece stainless steel ring with 20um scale marked directly on the periphery.

It features the In-Trac optical reference mark, which repeats, regardless of direction, at operational speeds of over 4500rev/min (52mm diameter) and up to 85C.

The Signum RELM high accuracy linear encoder comprises the SR readhead, Si interface and 20um RELM scale, which is offered in defined lengths.

Initially available in Invar, which provides a low thermal expansion of 1.4um/m/C, the RELM scale is offered with a choice of In-Trac reference mark positions and dual optical limits.

Together with the robust, yet highly precise 20um spars, this enables the RELM to offer accuracy to +/-1um and resolution to 20 nm, satisfying the most demanding precision motion requirements.

Meeting demand for reliable, low-cost, high-speed rotary encoders, Renishaw's miniature magnetic rotary encoders provide class-leading performance along with "tough-guy" ruggedness and durability.

Semicon JAPAN visitors will see that the magnetic encoders are available in component, modular and packaged shaft-style models.

The RM family magnetic encoders offer up to 4096-count positioning resolution, accuracy to 0.4um, and operating speeds to over 9000rev/min.

Noncontact magnetic design eliminates seals, bearings and moving parts for lifetime reliability.

Standard models provide excellent shock and vibration resistance, and optional sealed models allow application in harsh environments and even immersion.

Low cost, compact size and design simplicity enable use in a wide range of industries.

Unique RLE fibre optic laser interferometer encoders deliver interferometer-based nanometre positioning accuracy from a remote laser source - even to two axes.

New detector head choices (six in all) allow careful matching to a wide range of application requirements, including capability for picometre-level resolutions.

Fibre-optic beam delivery greatly reduces optical path complexity, saves space on miniature machines, and keeps heat of the laser from affecting measurement axes.

Simple "bolt down/dial in" laser alignment enables ease of installation comparable to traditional tape- or glass-based encoders.

Applications include x-y stages, fibre-optic alignment machines, glass grinding machines, photomask machines, and other precision motion systems.

An optional real-time compensation system enables positional accuracy of 1ppm (1um/m) in a wide range of environmental conditions.

Renishaw's ML10 laser interferometer measurement system is used by some of the largest OEMs and end users in industries such as metal cutting, semiconductor processing, flat panel display production and biotechnology.

The ML10's unique properties ensure that the system provides a linear position reading resolution of just 1.24 nm, a range of up to 40m and accuracy better than 1ppm.

This combination of resolution, accuracy and range makes the laser interferometer an ideal tool for characterising the performance of motion systems, both large and small.

Visitors to Semicon Japan requiring a precision motion analysis system should also evaluate QuickView, a new software package from Renishaw designed to make the ML10 laser an even more flexible and powerful analysis tool.

For years, electronic engineers have relied on oscilloscopes to study high-speed variations in voltage or current.

Now, QuickView software provides mechanical engineers with a similar capability, allowing them to study minute variations in linear or angular displacement, velocity or acceleration.

With a simple graphical interface QuickView allows very flexible operation, avoiding the need for predefined measurement targets and sequences - just point and measure, ideal for ad-hoc system investigations.

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