Encoders highlighted at microlithography show

Focus on high precision laser and optical position feedback encoder systems at Microlithography 2006 exhibition in San Jose, California, USA, from 21st to 22nd February 2006.

Renishaw will be focusing on its high precision range of laser and optical position feedback encoder systems when it attends the Microlithography 2006 exhibition in San Jose, California, USA, from 21st to 22nd February 2006.

Renishaw will be exhibiting on stand 405.

Organised by the Spie international society for optical engineering, the Microlithography exhibition is claimed to be the premier international event for all aspects of IC design, fabrication, processing and manufacturing.

Visitors can see the latest tools, instruments, components and devices in lithographic technologies presented by over 130 companies.

The organiser says the exhibition will appeal to scientists, engineers, product developers, chip designers or packagers, as it covers everything from traditional optical lithography to cutting-edge technologies such as immersion, EUV and nano-imprint.

At the show, Renishaw will have its high resolution laser interferometer encoders, additions to its Signum range of encoders, including the Relm high accuracy linear scale and Signum software for real-time system diagnostics, plus miniature magnetic rotary encoders.

There will also be the chance see a range of high-performance high-vacuum encoders, and hear about improvements in speed, resolution and reliability to Renishaw's standard optical encoder lines of RG2 and RG4 linear encoders.

The firm's RLE fibre optic laser interferometer encoders deliver interferometer-based nanometer positioning accuracy from a remote laser source, even to two axes.

Detector head choices (six in all) allow matching to application requirements, including capability for picometer-level resolutions.

Fibre optic beam delivery reduces optical path complexity, saves space on miniature machines and keeps the heat of the laser from affecting measurement axes.

Bolt-down and dial-in laser alignment enables ease of installation.

Applications include x-y stages, fibre optic alignment machines, glass grinding machines, photomask machines and other precision motion systems.

An optional real-time compensation system enables positional accuracy of 1ppm (1um/m) in various environmental conditions.

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