Sensor produces real-time pressure maps
A
Sensor Products product story
Edited by the Engineeringtalk editorial team
May 1, 2003
Tactilus is a novel electronic tactile force and pressure indicating sensor that allows an engineer to monitor precisely how force is disbursed between any two contacting surfaces in real time.
Tactilus is a novel electronic tactile force and pressure indicating sensor that allows an engineer to monitor precisely how force is disbursed between any two contacting surfaces in real time.
Tactilus is a valuable aid in R and D and QC/QA in determining proper pressures in wafer polishing as well as in wafer bonding pressure distribution.
"The system will aid in determining precise pressure distribution for not only the actual wafer bonding process", says Senior Technical Manager Jeffrey Stark, "but also for proper polishing head contact pressures.
Balancing contact pressures between the bonding head/wafer interface or polishing head/wafer interface during machine set-up can help maximise yields and machine utilisation".
Stark noted the system could be used for either single-spindle or multispindle heads.
Custom sensor designs are possible and can be designed to measure the entire area under a multispindle head.
Tactilus is "a Windows-based system that consists of an electronic sensor element 'skin'", continued Stark, "an interface controller, and software.
The sensor skin is essentially a thin flexible sheet that is densely packed with sensing points or pixels.
These sensing points can be spaced as close as 1mm apart and can collect data as rapidly as 60,000 times per second".
The Tactilus sensing element is only 10 mils, allowing adaptation over curved surfaces or invasive intolerant environments.
"The Tactilus element's internal structure is very durable and can be utilised for thousands of tests before replacement is necessary", Stark concluded.
The sensor system is precalibrated and requires minimal user training prior to operation.
System requirements are Windows 95 (and higher) OS, 16Mbyte free disk space and 64Mbyte RAM.
Not what you're looking for? Search the site.
Google Ads
Contact Sensor Products
Related Stories
- Dytran's 3224A3 measures vibration in tight spaces
- OCR Reader reads 100 characters per scan
- OP sensors precisely detect parts
- Ozone sensor provides drift-free measurement
- LMS 100 laser sensors avoid false signals
Articles by product category
- Consultancy and Services (903)
- Machine Building (4,517)
-
Engineering Design Software (6,179)
- Engineering Design Software (12)
- 2D CAD software (200)
- 3D CAD software (1,157)
- FEA and structural analysis software (369)
- Fluid, thermal, noise, vibration software (334)
- Simulation, modelling, validation software (914)
- Rendering, visualisation, styling software (196)
- Materials design and moulding design software (151)
- Process, instrumentation, automation software (258)
- Electrical design software (164)
- Publishing and documentation software (229)
- Maths, charting, statistics, QA software (317)
- Data, document management software (310)
- CAM, CNC, production management software (568)
- File conversion software, data capture (351)
- PLM and collaboration software (649)
-
Drives, Motors and Controls (3,361)
- Drives, Motors and Controls (1)
- Precision Motors and Gears (411)
- Industrial Drives/Controls (1,276)
- Linear Drives and Motors (114)
- Industrial Motors (497)
- Stepper and Servo Drives, Motors, Controls (1,060)
- Small Mechanical Components, Joining, Tools (1,975)
-
Control and Instrumentation (5,028)
- Plantwide control (1,324)
- Plant- and Machine-Wide Communications (1,174)
- Smaller-Sized PLCs (387)
- CNC and Motion Controllers (184)
- Mid-range and Large PLCs (201)
- Power Supplies, Uninterruptible Power (562)
- HMIs/Operator Interfaces (294)
- Logic Controllers, Timers and Relays (96)
- Cabling, Conduit, Signal Conditioning (806)
-
Monitoring, Measurement and Quality (5,459)
- Monitoring, Measurement and Quality (1)
- Data acquisition Software and Communications (494)
- Data Acquisition Hardware and PC I/O Boards (472)
- Electrical and Electronic Testing, PAT Equipment (630)
- Form/co-ordinate, optical, vision instruments (703)
- Gauges, Indicators and Instruments (440)
- Data loggers (422)
- Materials testing equipment (421)
- Telecomms/network test equipment, software etc (154)
- Testing and Calibration Services and Information (500)
- Testing, analysing and monitoring equipment (1,222)
-
Electrical and Electronic Equipment Design (4,160)
- Batteries, chargers and circuit protection (555)
- Connectors, Terminals, Busbars, Slip Rings (679)
- Enclosures and Equipment Cooling Fans (709)
- Knobs, Handles and Enclosure Hardware (420)
- PCs and Embedded Systems (798)
- Electrical and Electronic Subassemblies (369)
- Electrical and Electronic Components (630)
-
Materials and Processing (2,963)
- Materials and Processing (5)
- Materials and components (2,215)
- Rapid Prototyping (458)
- Materials processing and testing (285)
-
Engineering Industry News, Resources (6,093)
- Engineering Industry News, Resources (4)
- Engineering Business News, Views (388)
- Engineering Exhibitions, Events (562)
- Engineering Conferences (425)
- Engineering Seminars (400)
- Engineering Industry Developments, Awards (633)
- Engineering Guides, Newsletters (349)
- Engineering Recruitment, Employment (219)
- Engineering Training Courses (433)
- Engineering Education, Resources, Standards (838)
- Engineering Industry Reports, Surveys (597)
- Electronic Resources for Engineers (278)
- Health and Safety Legislation (402)
- Health and Safety Strategy, Risk Assessment (113)
- Health and Safety Consultancy, Software (175)
- Health and Safety Events, Training, News (277)
-
Powertrain Design (3,598)
- Powertrain Design (2)
- Bearings (939)
- Chains and belts (326)
- Gears, brakes, couplings and engines (1,441)
- Hydraulic Components (471)
- Lubricants (418)
-
Capital Equipment (3,387)
- Capital Equipment (1)
- Manufacturing Machinery and Plant Equipment (468)
- Production line blowers and fans (62)
- Compressors and Air Treatment (510)
- Electronics Manufacturing, Tools, Instruments (192)
- Electrical hardware (131)
- Machinery and Production Equipment (1,093)
- Robotics, Handling and Storage (930)
-
Sensors (7,080)
- Sensors (8)
- Accelerometers and Vibration Sensors (427)
- Loadcells, Force Sensors, Torque Sensors (699)
- Pressure sensors (621)
- Flowmeters and Flow Sensors (618)
- Level Sensors and Leak Detectors (527)
- Linear Position Sensors (399)
- Rotary Position, Tilt and Angular Sensors (546)
- Proximity Sensors (700)
- Gas, Chemical, Radiation, Magnetic Sensors (284)
- Humidity and Environmental Sensors (152)
- Temperature sensors (612)
- Vision and Colour Sensors (1,384)
- Barcode Sensors (103)
- Valves, Pumps, Process Hardware (3,623)
