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Product category: Electric Linear Actuators
News Release from: Stratton Technologies | Subject: Alio Industries linear and rotary stages
Edited by the Engineeringtalk Editorial Team on 06 February 2003

Stages offer nanometre-precision motion

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Stratton Technologies has a range of high-precision linear and rotary stages from Alio Industries.

Stratton Technologies has a range of high-precision linear and rotary stages from Alio Industries Based on the Nanomotion linear piezomotor, these stages offer encoded motion at better than 5nm resolution over travel ranges from 24 to 200mm

A DC operational mode allows moves with 1nm resolution.

As semiconductor devices and features shrink in size more demands are placed on the tools required for inspection, lithography, and probing.

Alio Industries stages are particularly suited to these high resolution, high speed move-and-settle applications with the added bonus of being designed for use in high-vacuum environments down to 10e-10Torr.

They are clean-room compatible (Class 10) and generate no electromagnetic fields.

The range also includes a six-axis parallel kinematic robotic system (Hexapod) which offers 10nm resolution revolving around a virtual point in space coupled with speeds of up to 80mm/s.

This robotic product forms the basis of the next generation of automated nanopositioning systems for the most demanding applications in photonics, packaging, test, measurement, medical and semiconductor manufacturing.

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