Flow sensors resolve to analytical levels

Sensirion has developed novel technology for ultrasensitive flow measurement in analytical instruments.

Sensirion has developed novel technology for ultrasensitive flow measurement in analytical instruments.

Ultrafast CMOSens liquid flow meters accurately measure even nanolitres per minute with stunning repeatability.

CMOSens mass flow controllers offer striking accuracy (0.8% of setpoint and 0.1% full-scale) and ultrafast settling time of only 150ms.

Thanks to the fusion of digital signal processing with a thermal sensor element on a single semiconductor chip (patented CMOSens technology) the new flow meters and mass flow controllers (MFC) allow for the output of a linear, completely calibrated, temperature-compensated flow measurement signal.

For liquid mass flow measurement in LC applications, lab-on-a-chip systems and liquid handling, CMOSens microchips can be placed in the position of being able to detect flow rates in the range of a few microlitres or nanolitres per minute.

Mounted on the outside of fused silica, Peek or steel capillaries the highly sensitive CMOSens microchips detect the flow through the tubing material and a simple straight capillary forms the flow path.

Further, by using this technology, great repeat-ability for analyses - the most important criterion in HPLC - is ensured.

It works totally media isolated and with minimised inner volume, the reliable monitoring of the process is guaranteed.

The fused silica based, fully digital, calibrated and temperature compensated liquid flow sensor SLG1430 works with a repeatability greater than 0.8% of the measured value and achieves a fast response time of less than 50ms.

Moreover, the device offers resolutions of 0.5nl/min and better.

It is equipped with micro fluidic connectors for OD360 capillaries and a digital RS232 interface.

Ultrafast response times in the millisecond range help users to monitor effects in their systems which they have not previously been able to observe.

In addition to this, there is a new generation of mass flow controllers (MFC) for gases based on CMOSens technology.

The CMOSens PerformanceLine offers striking performance, fast settling time and attractive cost for OEM applications.

The device achieves an accuracy of 0.8% of setpoint respectively 0.1% of full scale.

This makes it ten times more precise than any conventional analogue MFC.

With a settling time of only 150ms, the PerformanceLine is also ten times faster than conventional devices.

Another important customer benefit is the large dynamic range of 1:11000.

This means that one single CMOSens MFC covers the measurement range of several traditional mass flow controllers, which can significantly reduce system cost, particularly in OEM applications.

The CMOSens PerformanceLine can operate at input pressures up to 10bar.

The sensor is sealed in a vacuum-tight stainless-steel housing element and it can be used under very harsh conditions.

This makes the PerformanceLine the ideal choice for a wide range of applications, such as mass flow controlling for process control (chemical engineering, pharmaceutical processing etc), medical applications, fuel cells and gas flow metrology.

The CMOSens PerformanceLine is fully compatible with conventional analogue mass flow controllers.

The analogue electrical interface (0-5V) and the supply voltage of +/-15V DC guarantee easy-to-use plug and play solutions.

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