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Product category: Flowmeters and Flow Sensors
News Release from: Sensirion | Subject: CMOS-based microsensor chip
Edited by the Engineeringtalk Editorial Team on 17 September 2007

Tiny chip handles flow sensing

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CMOS-based microsensor chip for flow sensing The MEMS sensor company Sensirion AG (Switzerland), presents a fourth-generation CMOS-based microsensor chip for flow sensing.

Sensirion has released a fourth-generation CMOS-based microsensor chip for flow sensing It will be used in fuel cell systems and medical applications like liquid drug flow monitoring in portable systems, implantables or disposable drug delivery solutions

The semiconductor chip opens up new product design opportunities for microfluidic systems and drug delivery applications.

The fully digital microchip combines a flow sensor element with memory for calibration data and digital intelligence for linearisation and temperature compensation on a single MEMS sensor chip (size 2 x 3.5mm).

The MEMS chip can be bonded on the outside of a capillary and sense through the wall of this channel.

Such sensors enable bubble detection and accurate measurement of very low liquid flow rates down to nanolitres per minute with very short response times and outstanding repeatability.

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