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High vacuum valves resist corrosive gases

A SMC Pneumatics (UK) product story
Edited by the Engineeringtalk editorial team Aug 10, 2005

A new range of lightweight, precision cast, high vacuum valves have been specifically developed to dramatically reduce the effects of corrosion by the use of SCS13 body material.

Semiconductor wafer manufacturers are among a growing number of specialists whose processes either use, or produce, corrosive gases during manufacture.

This fact alone is why an increasing number of engineers believe that many of today's machine components are simply not man enough for the job.

SMC Pneumatics has now clearly answered some of these concerns with the launch of its latest stainless steel high vacuum valve range - Series XM and XY.

This new range of lightweight, precision cast, high vacuum valves have been specifically developed to dramatically reduce the effects of corrosion by the use of SCS13 body material which is equivalent to SUS 304.

Currently available in two models, XM angle type and XY inline type, their high quality precision casting prevents the build up of gases, provides improved heat conductivity and also offers easier internal cleaning.

Following extensive development testing, the service life of these single and double acting valves is estimated to be in excess of 2 million cycles when operated using inactive gas under vacuum within temperature ranges from 5 to 150C.

Available in flange sizes between 16 and 80mm dependant on model type, these stainless steel high vacuum valves really are outstanding performers.

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