Vertical stage has wafer-scale accuracy
A
Steinmeyer UK product story
Edited by the Engineeringtalk editorial team
Apr 14, 2006
The model HT 03-LM vertical positioning stage offers a travel of 3mm with accuracy of 2um and repeatability of 20nm, making it ideal for wafer positioning.
New from Steinmeyer FMD Division, the model HT 03-LM vertical positioning stage offers a travel of 3mm with accuracy of 2um and repeatability of 20nm, making it ideal for wafer positioning.
A compact piezo linear motor is used to drive a 10:1 ratio wedge.
Precision crossed roller bearings ensure smoothness of motion and high rigidity.
Manufactured from stable aluminium alloy, the HT 03-LM weighs only 3.6kg, but can handle loads up to 200N.
Maximum speed is 25mm/s and position feedback is provided by a precision linear encoder with 0.1um resolution.
Extra cost options include preparation for high vacuum and clean room operation.
This stage is ideal for applications in the semiconductor, fibre optic, medical/life sciences, optical, laser systems and robotics industries.
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