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Motion control aids semiconductor processing

Edited by the Engineeringtalk editorial team Jun 22, 2004

Danaher Motion offers integrated and component-level motion control solutions for a wide range of semiconductor process applications.

Danaher Motion offers integrated and component-level motion control solutions for a wide range of semiconductor process applications such as CMP, etching, metrology, wafer handling systems, wafer inspection, wafer slicing, tab bonding, wire bonding, ion implantation and lithography and flat panel applications.

These high-performance systems include servomotors and drives, step motors and drives, networked motion control solutions, high-precision wafer positioning systems and linear motion systems.

Danaher Motion's expertise is built on leading motion control brands, including: Dover Instruments, Kollmorgen, MEI, Pacific Scientific and Thomson.

"As semiconductor manufacturing continues to become more complex, motion control solutions play an increasingly important role in the overall design and performance of next-generation process tools and fab-wide wafer handling systems", says Dennis Gallagher, Global Sales Manager, Strategic Markets, Danaher Motion.

"Equipment OEMs require smaller, more accurate, and higher performing motion control systems than ever before".

"Danaher Motion has built a leadership position based on years of delivering innovative solutions that meet the OEMs demands for precision, reliability, and performance".

Danaher Motion's Kollmorgen direct-drive rotary (DDR) motors are directly couple to the load and eliminate the mechanical transmission components of conventional configurations.

The result is an overall smaller machine with maintenance-free motion control for greater machine uptime and productivity, and with the added benefit of up to 20dB quieter operation.

Danaher Motion's Kollmorgen AKM family of high performance conventional servomotors is available in 12,000 standard configurations, with a global feature set, and are tested and approved to satisfy global standards of application.

This flexibility facilitates short lead times while making it easier for the design engineer to select the motor they need from a single product family.

Pacific Scientific stepper motor and drive solutions are also available for semiconductor applications better suited to stepper functionality.

Danaher Motion brings powerful integrated control solutions to the semiconductor industry with its industry-leading MEI motion platforms and SynqNet communications network.

The latest SynqNet all-digital motion network solutions from MEI fulfil machine builders' demands for increased performance, machine diagnostic capabilities, machine safety, and reduced time-to-market.

From software and controller, through the SynqNet network to drives and I/O devices, to the mechanical actuators and supporting equipment, Danaher Motion can provide a complete "pre-tuned" and predictive integrated control solution.

Danaher Motion offers a full line of off-the-shelf and custom engineered Thomson linear motion systems.

Thomson solutions include linear guides, linear bearings/carriages, ballscrew and leadscrew components, profile rail systems, tables and slides, as well as rodless and rod type actuators.

Danaher Motion also offers a variety of fully integrated Dover Instruments and NEAT-branded 200 and 300mm wafer positioning systems; Gen 5, 6 and 7 FPD air bearing gantries; x-y, z and rotary stages; high speed spindles; and custom OEM positioning system designs.

These systems are engineered for plug-and-play tool insertion for faster build times and higher levels of optimisation.