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ULVAC Technologies
Address:
401 Griffin Brook Drive
Methuen
MA 01844
USA
Telephone: (USA) +1 978-686-7550
http://www.ulvac.com
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The only news release received from ULVAC Technologies to date:
Cost-effective metal film thickness measurement
The Mesec is a new metal film metrology instrument for copper seed and electroplated copper layers on 200 or 300mm silicon wafers.
News from ULVAC Technologies (31 July 2002)
