Polymer chosen for semiconductor upgrade

Edited by the Engineeringtalk editorial team Jun 6, 2008

King Polytechnic Engineering switched to Victrex Peek polymer as the PTFE coating for its products because of the polymer's chemical resistance, high-temperature performance and bonding strength.

When King Polytechnic Engineering Company (KPEC), a major optoelectronics and semiconductor equipment manufacturer, wanted to replace the PTFE coating on its medium to large-sized SPIN/DIP coating equipment, it switched to a Vicote coating based on Victrex Peek polymer because of the coating's chemical resistance, high-temperature performance and bonding strength.

Frequent maintenance of the spin coating part was a major reason why KPEC switched to the Vicote coating.

According to Frank Huang, Plant Manager of KPEC Clean Room Division, "When the PTFE coating was placed in an extreme environment with highly acidic/basic chemicals and high-temperatures, it stripped off easily after the thermocycle of developing, etching and stripping".

"This resulted in frequent maintenance of the spin coating part".

"However, since we switched to the Vicote coating, we have not received any maintenance requests".

The most crucial and difficult step in the manufacturing process of semiconductors and LCDs is photolithography.

Only through the SPIN/DIP process can the stripper, etching and developing solution be completely fabricated on the wafer and the glass substrate.

This is done in an environment that contains highly acidic/basic chemicals and high temperatures, where the equipment's stability and uniformity can directly affect the yield of wafers and LCD panels.

According to Gary Li, Country Manager of Victrex Taiwan, "The Vicote coating helps reduce the particle generation of the spin coater during the developing, etching and stripping processes".

"This not only extends the equipment lifespan and reduces the need for maintenance, it also significantly enhances the production efficiency and yield of wafers and LCD panels".

"Because the Vicote coating has exceptional abrasion resistance, bonding strength on substrate and chemical resistance it can significantly lower the particle generation and withstand most chemical substances.

Applying it on the key components of processing equipment can help extend the equipment's lifespan and reduce the need for maintenance, thus enhancing the production efficiency and yield of wafer and LCD panels for end users.

KPEC currently uses the Vicote coating on its medium to large-sized SPIN/DIP equipment series for wafers and LCD panels that are 8in or larger".

Li said "With the advances toward larger wafer size and higher precision and an environment involving stronger chemicals and higher temperatures, the introduction of advanced materials and processing techniques becomes key to the industry's development".

Vicote coatings, based on Victrex Peek polymer, offer exceptional scratch and wear resistance, high-temperature performance, strength and durability.

Eco-friendly Vicote coatings were developed to fill the performance gap found in many existing coating technologies today.

Whether applied to industrial, automotive, food processing, semiconductor, electronics or pharmaceutical parts, Vicote coatings are a great choice for engineers looking to improve the wear performance and life of the coated part in their applications.

Vicote coatings can be applied using electrostatic or conventional dispersion spray techniques.